Kinetic Simulation of He radio frequency capacitively coupled plasma | ||||
| Delta Journal of Science | ||||
| Article 7, Volume 43, Issue 1, May 2021, Page 89-96 PDF (1.43 MB) | ||||
| Document Type: Research and Reference | ||||
| DOI: 10.21608/djs.2021.190753 | ||||
 View on SCiNiTO | ||||
| Authors | ||||
| M. Shihab* 1; A. Elbadawy1; M. S. Afify2; N. El-Siragy1 | ||||
| 1Tanta University, Faculty of Science, Physics Department, Tanta, Egypt. | ||||
| 2Department of Physics, Faculty of Science, Benha University, Benha, P.O. Box 13518, Egypt. | ||||
| Abstract | ||||
| Radiofrequency capacitively coupled plasma is studied theoretically using a Particle-in-Cell code. For He discharge, the timeaveraged sheaths are in the range of few centimeters. The sheath potential, ion, and electron energy and angular distributions, discharge current, and dissipated power depend on the driven potentials and frequencies. Increasing the amplitude of the high radio frequencies increases the bulk density and the sheath potential and, consequently, increases the plasma processing rate. Increasing the intermediate radio frequency amplitude allows a wider sheath with a broad ion energy distribution and a narrower ion angular distribution. Changing the amplitude and the phase shift between driven frequencies provide different energies and angular distribution allowing performing various processes. The interplay between the sheath and bulk dynamics in the intermediate radiofrequency regime and the high-frequency regime may excite harmonics in the discharge current. | ||||
| Keywords | ||||
| Radio frequency sheaths; He discharge; Ion energy and angular distribution; Electron energy distribution; Power dissipation | ||||
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