FORMATION OF ZIRCONIUM TITANATE FROM MULTI-LAYERED STRUCTURE OF ZrO2 AND TiO2 DEPOSITED BY PULSED RAPID THERMAL CHEMICAL VAPOUR DEPOSITION | ||||
| The International Conference on Chemical and Environmental Engineering | ||||
| Article 30, Volume 4, 4th International Conference On Chemical & Environmental Engineering, May 2008, Page 496-502 PDF (611.36 K) | ||||
| Document Type: Original Article | ||||
| DOI: 10.21608/iccee.2008.38420 | ||||
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| Authors | ||||
| KO C. K.1; SONG B. Y.2; LEE W. G.3 | ||||
| 1Graduate student, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea. | ||||
| 2Analytic scientist, Central Laboratory, Kangwon National University, Chuncheon, Korea. | ||||
| 3Professor, Dpt. of Chemical Engineering, Kangwon National University, Chuncheon, Korea, Tel)+82 11 380 5219. | ||||
| Abstract | ||||
| ABSTRACT PRTCVD (pulsed rapid thermal chemical vapor deposition) method has been introduced to prepare zirconium titanate (ZrTiO4) films from a multi-layered structure composed of ZrO2 and TiO2 as a primitive oxide, which allows for the preparation of a given film with different element per cycle and precise control over the thickness of the film. The feasibility of PRTCVD was evaluated and it was confirmed that a multi-layered structure composed of different primitive oxides can be easily produced by PRTCVD and transformed into a multi-component single phase oxide such as zirconium titanate by an appropriate thermal annealing process. | ||||
| Keywords | ||||
| PRTCVD; Zirconium titanate; Multi-layered structure; Thermal annealing | ||||
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