NUMERICAL STUDY OF PARTICLES GENERATION AND FLOW I SiH4/H2 DISCHARGE | ||||
| The Egyptian International Journal of Engineering Sciences and Technology | ||||
| Article 9, Volume 16, EIJEST, Vol. 16, 2013, June 2016, Page 88-98 PDF (1.33 MB) | ||||
| Document Type: Original Article | ||||
| DOI: 10.21608/eijest.2013.96795 | ||||
 View on SCiNiTO | ||||
| Authors | ||||
| H ElWelly* ; H Abdel Mohsen; F ElTokhi | ||||
| Faculty of Engineering, Zagazig University | ||||
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